![]() ![]() ![]() Once these are pressurized, the cryopump rides on a cushion of air. The suggested passive vibration isolator integrated a dynamic vibration absorber with a negative stiffness spring are depicted in Fig. Automatic leveling valves control the flow of compressed air to ballast tanks, which in turn maintain air pressure in the pneumatic cylinders. The Passive Vibration Isolator Suggested. The elastomer isolators are mechanically coupled to ultra-low friction pneumatic cylinders. NEC VI-2 vibration isolators have the same basic design as the VI-1, with the addition of a pneumatic suspension system that dramatically reduces the transmitted vibrations. Model VI-2: Typically used with cryopumps and other sensitive systems | Vibration isolation: as low as 2 Hz Used for active vibration isolation, which consists in reducing noise and vibrations conveyed from the machine into its surroundings, as well as passive. Common vacuum flanges used (custom flanges also available).Usable in either vertical or horizontal orientation.NEC VI-1 vibration isolators consist of two vacuum flanges separated by compliant large aperture welded bellows and a set of low profile elastomer vibration isolators. Learn how Sorbothane compares to other vibration isolators. Model VI-1: Typically used with turbo pumps | Vibration isolation: as low as 40 Hz Unlike most other substances, Sorbothane can be used to both isolate and damp vibrations. In all versions of both models, the aperture of the bellows has been chosen to maximize conductance and clearance while minimizing interference with flange hardware. NEC offers two vibration isolator models based on the amount of vibration isolation needed. They significantly reduce vibration transmitted to target chambers, microscopes, wafer processing chambers, end stations, or other vacuum apparatus that must be kept motionless. 90 Kg Capacity, M10x1.50 Standard Deflection Vibration Isolator - 2-3/8 Diam, 36mm High. NEC vibration isolators are designed to mount between a turbo molecular pump or cryopump and a vacuum system. ![]()
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